As a consequence of recently increased activities in the area of improved resource use a multiplicity of terminology and its interpretation has evolved. Phrases as resource efficiency or resource effectiveness have become quite popular. However their interpretations vary depending on the scope and perspective taken. In order to clarify the meaning and to found a theoretical basis for researchers and practitioners this review discusses various expressions found in literature focusing on improved resource use in industrial production. The description of relevant terminology provides researchers with a notion of how the perception of improved resource use in industrial production has evolved. The description finally results in a conceptual model for production system evaluation.